EDAlink

Description

EDAlink is a complete hardware and software solution for all data collection needs for the semiconductor and related industries. It collects data from tools using a variety of protocols and makes that data available not only via the emerging SEMI EDA standard, but also via other accepted standards by taking advantage of an adaptable plug in architecture. With EDAlink, end users of the data, including application providers, tool providers, and device manufacturers, can focus on the productive use of that data rather than on the methodology used to gather it.

Features

EDAlink provides a complete solution for process tool data acquisition. Features include:

• An interface to the end user that requires neither access to nor knowledge of the internal data acquisition communication technology and protocols
• Centralized data archiving for subsequent analysis
• A standard reporting and communication format from equipment to data analysis applications
• A Data Collection Server (DCS) for creating and managing Data Collection Plans (DCPs) from multiple tools that also acts as a repository for tool metadata
• Remote and web-enabled system administration
• A remote, web-enabled DCP Editor
• A remote, web-enabled Data Transaction Monitor (DTM) that monitors real-time data collection
• Has small footprint (6"x5.75"x2.25"), high performance (Pentium III 1.3 GHz), and a local hard drive (10GB) all in a self-contained device that can coexist with other applications and hardware on the tool
• Extensive data port options including serial, parallel, RJ45, 1394 Firewire, and USB
• A second logical connection to the tool while maintaining legacy point-to-point connection for MES control
• Support for multiple concurrent and independent EEC clients including Equipment Health Monitoring (e-Diagnostics), Advanced Process Control (APC), and Overall Equipment Efficiency (OEE) applications
• Data transmission with 128-bit encryption as well as client authentication and authorization

Architecture

EDAlink architecture is built upon flexible, adaptable, and independent modules as shown in the following schematic:

Functions

These existing modules provide the following functions:

• SECS/GEM Data Acquisition Module: Interfaces with and communicates messages to and from the tool SECS port and the MES as well as provides data to other applications and the Data Collection Manager
• Sensor Data Acquisition Module: Gathers data from various sensors associated with the process equipment and passes it to the Data Collection Manager
• Embedded Control System Data Acquisition Module: Collects data from tools that have made additional data available through other mechanisms such as RPC, TCP/IP, COM/DCOM, MSMQ, MQ Series, JMS or other messaging middleware
• File and Database Data Acquisition Module: Collects data from tools that have made additional data available via either file transfer (i.e., FTP) or database access (e.g., SQL)
• OSI ECHO Database: Gathers and archives time-stamped data at high speeds and with high capacities
• Authentication and Authorization Manager Module: Controls user access to the tool data as per emerging SEMI standards
• Data Collection Manager Module: Collects data from the above sources and then stores it within EDAlink in the OSI ECHO database
• Data Transmission Manager Module: Transmits data to various EEC clients, typically via HTTP using XML format in SOAP envelopes
• Data Monitoring Module: Allows the remote, web-enabled Data Transaction Monitor (DTM) to monitor the status of EDAlink and data collection

In addition to the modules above that are an integral part of EDAlink, the following ancillary modules would typically be remote applications that access EDAlink. For the purposes of evaluations and demonstrations, many of these applications can actually reside on the EDAlink box, although this may not be optimal for a significant deployment.

• Data Collection Plan (DCP) Editor: This is the web-enabled remote application that allows for the creation, editing, activation/deactivation, and viewing of Data Collection Plans.
• Data Collection Server (DCS): This is the remote repository for data collection. It can easily collect data from several tools and can make this data available through a variety of means to users within the intranet and, if configured by the user, to authorized viewers outside the intranet. In addition, this DCS will be capable of supporting the OSI PI product that provides a wide variety of additional functionality.
• Data Transaction Monitor (DTM): This is the web-enabled remote application that allows for the monitoring of one or more EDAlinks to assure correct data collection, transmission, and storage.
• System Administration: All of the administration tasks, including set-up, initialization, and maintenance, of one or more EDAlinks can be administered remotely by this web-enabled application.

Compliance to Standards

CIMAC is committed to achieving and maintaining EDAlink compliance with the existing and emerging standards. The EDAlink meets all relevant SEMI standards as well as the appropriate web based standards (HTTP, XML, SOAP, etc.). In addition, EDAlink meets all of the relevant criteria from the proposed standard for Equipment Data Acquisition (Document #3563), the standard most relevant to EDAlink. Specifically, these areas are:

• General Interface
  • Data from SECS/GEM made available via EDA interface
  • Capable of transmitting subsystem processes and actuator operations
  • Time resolution of .01 seconds
• Transport and Messaging
  • Use of Ethernet using HTTP on top of TCP/IP as the message transport
  • Messages are XML data within SOAP envelopes
  • The EDAlink interface is a separate logical port from the SECS/GEM control port on the tool.
• Data Management and Data Collection Plans (DCPs)
  • Use of DCPs to describe which events, exceptions, and data variables will be sent through the interface when that plan is activated
  • Management of DCPs through either SECS/GEM or EDA interface
  • Multiple data collection clients via the EDA interface.
  • Ability to warn clients of equipment performance degradation
  • Support for data management states and transitions
  • Ability to edit and manage DCPs via the DCP editor
  • Users can modify, add, and delete DCPs via the DCP Editor.
  • Data transmission will continue independent of the SECS/GEM communication state of the equipment.
• XML/SOAP Message Formats
  • XML data management requests and responses formatted as specified
  • SOAP message body formatted as specified
  • DateTime, EDA Status, Event, Exceptions and Alarms are XML messages formatted as specified
  • XML Schema document provided as “eda.xsd”.
  • Interface description document provided as “eda_equipment.wsdl”.
• Security
  • URI’s of data consumers and data managers can be specified at the equipment.
• Metadata
  • Equipment metadata accessible to off-tool clients via the Data Collection Server (DCS)
  • Metadata stored as XML documents.
  • Metadata includes a model of the equipment’s physical structure
  • Metadata includes any parameters, events, exceptions, and error that can be included in a DCP.